6th．Individual award．Winner

Leaping Six Generations: The Odyssey of an Immersion Lithography Expert in Mass Production

Tracing the history of semiconductor technology, Academician Burn J. Lin, a foremost scientist in optical lithography, made a pivotal contribution by introducing the concept of immersion lithography using water as the medium at the 193 nm vacuum wavelength. He successfully convinced the industry to adopt this as a mainstream technology. This groundbreaking process, evolving from theoretical invention to mass production on the production line, positioned Taiwan to set industry standards for the first time. It enabled the country to leapfrog six technological generations and emerge as a global leader. Holding numerous prestigious titles, Burn remains committed to advancing semiconductor education in his later years, spearheading a newly established college dedicated to nurturing domestic semiconductor talents.

• Date of announcement：2024/04/29
• Last updated： 2026/05/15
• Views：585